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| 品牌：EBARA | 型号：Ebara 50 X 20 Dry Pump | 材质：铸钢 |
| 驱动方式：电动 | 用途：真空 | 原理：真空泵 |
| 功率：00 | 极限压力：5.33 x 10-3 mbar（pa） | 外形尺寸：00000 |
| 规格：Ebara 50 X 20 Dry Pump |
Ebara 5020 Dry Vacuum Pump
Model Number:5020
Serial Number:DPC-932438
System Number:S306-2/200003REV-A
Pumping Speed:USA/60 Hz - 3600
Brief Descr-ption:
The 5020 is designed for operation in harsh applications such as: LPCVD, PECVD, CVD and me-tal etch.
Specifications:
Pumping Speed:3600 l/min. (Nitrogen)
Ultimate Pressure:4 x 10-3torr (5.33 x 10-3mbar)
Inlet Flange:50 mm KF
Exhaust Flange:40 mm KF
Duty Service:Corrosive
Rotational Speed:3460 RPM
EBARA 50*20干式真空泵
序列号 DPC-932438
系统号 S306-2/200003REV-A
转速 3600 60HZ 可调为50HZ
系统压力 4 x 10-3torr (极限压力5.33 x 10-3mbar)
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